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Automated visual inspection of CMS HGCAL silicon sensors

A custom semi-automated visual inspection system has been implemented in the clean room for HGCAL sensor testing. The system uses a programmable xy-stage, the sensor is moved beneath a combination of a microscope and a camera in a scan pattern.

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Cite this as

Sonja Gr¨onroos, Maurizio Pierini, Nadezda Chernyavskaya (2024). Dataset: Automated visual inspection of CMS HGCAL silicon sensors. https://doi.org/10.57702/is7ib9f4

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Additional Info

Field	Value
Created	December 3, 2024
Last update	December 3, 2024
Defined In	https://doi.org/10.48550/arXiv.2303.15319
Author	Sonja Gr¨onroos
More Authors	Maurizio Pierini Nadezda Chernyavskaya