Architectural tunability of mechanical metamaterials in the nanometer range

TechnicalRemarks: Folder SEM_images includes all original SEM images, which are shown in the Paper.

Folder FIB_images includes all FIB images of the Auto Slice and View procedure. HFW = 20.7µm

Folder Dimenions and Shrinkage includes SEM images of investigated tetrahedral structures and corresponding table with dimensions and shrinkage calculation (pdf).