Dataset Groups Activity Stream Optimization of reactively sputtered mn$_3$gan films based on resistivity measurements TechnicalRemarks: Data of 5 figures as separate sheets in one MS_Excel file BibTex: @dataset{Sürgers_Christoph_and_Fischer_Gerda_and_Deng_Sihao_and_Hu_Dongmei_and_Wang_Cong_2024, abstract = {TechnicalRemarks: Data of 5 figures as separate sheets in one MS_Excel file}, author = {Sürgers, Christoph and Fischer, Gerda and Deng, Sihao and Hu, Dongmei and Wang, Cong}, doi = {10.35097/CEmxypAUUQgfFBKS}, institution = {RADAR}, title = {Optimization of reactively sputtered mn$_3$gan films based on resistivity measurements}, url = {https://service.tib.eu/ldmservice/vdataset/rdr-doi-10-35097-cemxypauuqgffbks}, year = {2024} }