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Manufacturing Dataset

The manufacturing dataset is a collection of 100,023 input measurements for an etching process in a semi-conductor manufacturing plant.

Data and Resources

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Cite this as

Amit Dhurandhara, Karthikeyan Shanmugam, Ronny Luss, Peder Olsend (2024). Dataset: Manufacturing Dataset. https://doi.org/10.57702/m65kw7ue

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It is available for use in manuscripts, and will be published when the Dataset is made public.

Additional Info

Field Value
Created December 2, 2024
Last update December 2, 2024
Author Amit Dhurandhara
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Karthikeyan Shanmugam
Ronny Luss
Peder Olsend