Dataset Groups Activity Stream Manufacturing Dataset The manufacturing dataset is a collection of 100,023 input measurements for an etching process in a semi-conductor manufacturing plant. BibTex: @dataset{Amit_Dhurandhara_and_Karthikeyan_Shanmugam_and_Ronny_Luss_and_Peder_Olsend_2024, abstract = {The manufacturing dataset is a collection of 100,023 input measurements for an etching process in a semi-conductor manufacturing plant.}, author = {Amit Dhurandhara and Karthikeyan Shanmugam and Ronny Luss and Peder Olsend}, doi = {10.57702/m65kw7ue}, institution = {No Organization}, keyword = {'Etching Process', 'Manufacturing', 'Semi-conductor'}, month = {dec}, publisher = {TIB}, title = {Manufacturing Dataset}, url = {https://service.tib.eu/ldmservice/dataset/manufacturing-dataset}, year = {2024} }