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Manufacturing Dataset

The manufacturing dataset is a collection of 100,023 input measurements for an etching process in a semi-conductor manufacturing plant.

Data and Resources

Cite this as

Amit Dhurandhara, Karthikeyan Shanmugam, Ronny Luss, Peder Olsend (2024). Dataset: Manufacturing Dataset. https://doi.org/10.57702/m65kw7ue

DOI retrieved: December 2, 2024

Additional Info

Field Value
Created December 2, 2024
Last update December 2, 2024
Author Amit Dhurandhara
More Authors
Karthikeyan Shanmugam
Ronny Luss
Peder Olsend