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3D X-ray Microscopy for 3D Object Detection, Segmentation, and Metrology

3D X-ray microscope data for 3D object detection, segmentation, and metrology for buried structures in advanced IC packages

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Cite this as

Ramanpreet S Pahwa, Soon Wee Ho, Ren Qin, Richard Chang, Oo Zaw Min, Wang Jie, Vempati Srinivasa Rao, Tin Lay Nwe (2024). Dataset: 3D X-ray Microscopy for 3D Object Detection, Segmentation, and Metrology. https://doi.org/10.57702/dhnpgnkd

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Additional Info

Field	Value
Created	December 16, 2024
Last update	December 16, 2024
Defined In	https://doi.org/10.23919/IWLPC52010.2020.9375903
Author	Ramanpreet S Pahwa
More Authors	Soon Wee Ho Ren Qin Richard Chang Oo Zaw Min Wang Jie Vempati Srinivasa Rao Tin Lay Nwe
Homepage	https://arxiv.org/abs/2009.11115