Dataset Groups Activity Stream 3D X-ray Microscopy for 3D Object Detection, Segmentation, and Metrology 3D X-ray microscope data for 3D object detection, segmentation, and metrology for buried structures in advanced IC packages BibTex: @dataset{Ramanpreet_S_Pahwa_and_Soon_Wee_Ho_and_Ren_Qin_and_Richard_Chang_and_Oo_Zaw_Min_and_Wang_Jie_and_Vempati_Srinivasa_Rao_and_Tin_Lay_Nwe_2024, abstract = {3D X-ray microscope data for 3D object detection, segmentation, and metrology for buried structures in advanced IC packages}, author = {Ramanpreet S Pahwa and Soon Wee Ho and Ren Qin and Richard Chang and Oo Zaw Min and Wang Jie and Vempati Srinivasa Rao and Tin Lay Nwe}, doi = {10.57702/dhnpgnkd}, institution = {No Organization}, keyword = {'3D X-ray Microscopy', 'IC Packages', 'Metrology', 'Object Detection', 'Segmentation'}, month = {dec}, publisher = {TIB}, title = {3D X-ray Microscopy for 3D Object Detection, Segmentation, and Metrology}, url = {https://service.tib.eu/ldmservice/dataset/3d-x-ray-microscopy-for-3d-object-detection--segmentation--and-metrology}, year = {2024} }
