Dataset Groups Activity Stream Deep Learning in Optical Metrology Deep learning in optical metrology BibTex: @dataset{Chao_Zuo_and_Jiaming_Qian_and_Shijie_Feng_and_Wei_Yin_and_Yixuan_Li_and_Pengfei_Fan_and_Jing_Han_and_Kemao_Qian_and_Qian_Chen_2024, abstract = {Deep learning in optical metrology}, author = {Chao Zuo and Jiaming Qian and Shijie Feng and Wei Yin and Yixuan Li and Pengfei Fan and Jing Han and Kemao Qian and Qian Chen}, doi = {10.57702/y7bp1bgt}, institution = {No Organization}, keyword = {'Deep learning', 'Machine learning', 'Optical metrology'}, month = {dec}, publisher = {TIB}, title = {Deep Learning in Optical Metrology}, url = {https://service.tib.eu/ldmservice/dataset/deep-learning-in-optical-metrology}, year = {2024} }
