Wafer Dicing Dataset

The dataset used in this paper for visual attention and deep learning for wafer dicing and defect detection.

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The json representation of the dataset with its distributions based on DCAT.
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Frederik Beuth, Tobias Schlosser, Michael Friedrich, Danny Kowerko (2024). Dataset: Wafer Dicing Dataset. https://doi.org/10.57702/6aiwzfdn

DOI retrieved: December 3, 2024

Field	Value
Created	December 3, 2024
Last update	December 3, 2024
Defined In	https://doi.org/10.48550/arXiv.2102.06955
Author	Frederik Beuth
More Authors	Tobias Schlosser Michael Friedrich Danny Kowerko