Research data to the manuscript "electrochemical etching strategy for shaping monolithic 3d structures from 4h-sic wafers", in: scientific reports 13:19086 (2023), doi: 10.1038/s41598-023-46110-2

doi:doi:10.22000/1722

Research data to the manuscript "electrochemical etching strategy for shaping monolithic 3d structures from 4h-sic wafers", in: scientific reports 13:19086 (2023), doi: 10.1038/s41598-023-46110-2

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Research data to the manuscript "electrochemical etching strategy for shaping monolithic 3d structures from 4h-sic wafers", in: scientific reports 13:19086 (2023), doi: 10.1038/s41598-023-46110-2

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