Research data to the manuscript "electrochemical etching strategy for shaping monolithic 3d structures from 4h-sic wafers", in: scientific reports 13:19086 (2023), doi: 10.1038/s41598-023-46110-2
Cite this as
Weber, Heiko B., Hochreiter, André (2023). Dataset: Research data to the manuscript "electrochemical etching strategy for shaping monolithic 3d structures from 4h-sic wafers", in: scientific reports 13:19086 (2023), doi: 10.1038/s41598-023-46110-2. https://doi.org/10.22000/1722
DOI retrieved: 2023
Additional Info
| Field | Value |
|---|---|
| Imported on | November 28, 2024 |
| Last update | November 28, 2024 |
| License | CC BY-NC 4.0 Attribution-NonCommercial |
| Source | https://doi.org/10.22000/1722 |
| Author | Weber, Heiko B.
|
| Given Name | Heiko B. |
| Family Name | Weber |
| More Authors |
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| Source Creation | 2023 |
| Publishers |
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| Production Year | 2023 |
| Publication Year | 2023 |
| Subject Areas |
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